JPH03101412U - - Google Patents
Info
- Publication number
- JPH03101412U JPH03101412U JP947290U JP947290U JPH03101412U JP H03101412 U JPH03101412 U JP H03101412U JP 947290 U JP947290 U JP 947290U JP 947290 U JP947290 U JP 947290U JP H03101412 U JPH03101412 U JP H03101412U
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- movable
- objective lens
- amount
- correction data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP947290U JPH03101412U (en]) | 1990-02-01 | 1990-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP947290U JPH03101412U (en]) | 1990-02-01 | 1990-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03101412U true JPH03101412U (en]) | 1991-10-23 |
Family
ID=31513073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP947290U Pending JPH03101412U (en]) | 1990-02-01 | 1990-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03101412U (en]) |
-
1990
- 1990-02-01 JP JP947290U patent/JPH03101412U/ja active Pending
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